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Role of Amino-Acid Adsorption on Silica and Silicon Nitride..:
Nagendra Prasad, Y.
;
Ramanathan, S.
Electrochemical and Solid-State Letters. 9 (2006) 12 - p. G337 , 2006
Link:
https://doi.org/10.1149/1.2351957
RT Journal T1 <Title>Role of Amino-Acid Adsorption on Silica and Silicon Nitride Surfaces during STI CMP</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2351957&Exemplar=1&LAN=DE A1 Nagendra Prasad, Y. A1 Ramanathan, S. PB The Electrochemical Society YR 2006 SN 1099-0062 JF Electrochemical and Solid-State Letters VO 9 IS 12 SP G337 LK http://dx.doi.org/https://doi.org/10.1149/1.2351957 DO https://doi.org/10.1149/1.2351957 SF ELIB - SuUB Bremen
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