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1 Ergebnisse
1
Electroenhanced Metallorganic Chemical Vapor Deposition of ..:
Kuo, Yu-Lin
;
Lee, Chiapyng
;
Chen, Gene
..
Electrochemical and Solid-State Letters. 10 (2007) 5 - p. D51 , 2007
Link:
https://doi.org/10.1149/1.2710956
RT Journal T1 <Title>Electroenhanced Metallorganic Chemical Vapor Deposition of Copper Films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2710956&Exemplar=1&LAN=DE A1 Kuo, Yu-Lin A1 Lee, Chiapyng A1 Chen, Gene A1 Liu, Kou-Liang A1 Yen, Yee-Wen PB The Electrochemical Society YR 2007 SN 1099-0062 JF Electrochemical and Solid-State Letters VO 10 IS 5 SP D51 LK http://dx.doi.org/https://doi.org/10.1149/1.2710956 DO https://doi.org/10.1149/1.2710956 SF ELIB - SuUB Bremen
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