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1 Ergebnisse
1
Removal of Backside Particles by a Single Wafer Megasonic S..:
Sohn, Hong-Seong
;
Hong, Uk Sun
;
Park, Chan-Gun
...
ECS Transactions. 11 (2007) 2 - p. 95-100 , 2007
Link:
https://doi.org/10.1149/1.2779367
RT Journal T1
Removal of Backside Particles by a Single Wafer Megasonic System
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2779367&Exemplar=1&LAN=DE A1 Sohn, Hong-Seong A1 Hong, Uk Sun A1 Park, Chan-Gun A1 Lee, Eui-Kang A1 Lee, Hyuk-Jun A1 Brause, Eric A1 Park, Jin-Goo PB The Electrochemical Society YR 2007 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 11 IS 2 SP 95 OP 100 LK http://dx.doi.org/https://doi.org/10.1149/1.2779367 DO https://doi.org/10.1149/1.2779367 SF ELIB - SuUB Bremen
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