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Surface Selective Growth of Ruthenium Films under Low-Tempe..:
Vasilyev, Vladislav Yu.
;
Mogilnikov, Konstantin P.
;
Song, Yong Won
Electrochemical and Solid-State Letters. 11 (2008) 12 - p. D89 , 2008
Link:
https://doi.org/10.1149/1.2987677
RT Journal T1
Surface Selective Growth of Ruthenium Films under Low-Temperature Pulsed CVD Conditions
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.2987677&Exemplar=1&LAN=DE A1 Vasilyev, Vladislav Yu. A1 Mogilnikov, Konstantin P. A1 Song, Yong Won PB The Electrochemical Society YR 2008 SN 1099-0062 JF Electrochemical and Solid-State Letters VO 11 IS 12 SP D89 LK http://dx.doi.org/https://doi.org/10.1149/1.2987677 DO https://doi.org/10.1149/1.2987677 SF ELIB - SuUB Bremen
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