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1 Ergebnisse
1
Pre-clean Study for Both Damascene SiN and N-Blok to Resolv..:
Xu, Jerry
;
Gao, Rong
;
Wang, Hongjie
...
ECS Transactions. 18 (2009) 1 - p. 605-610 , 2009
Link:
https://doi.org/10.1149/1.3096509
RT Journal T1
Pre-clean Study for Both Damascene SiN and N-Blok to Resolve Queue-time-dependent Dielectric Barrier VBD Degradation
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3096509&Exemplar=1&LAN=DE A1 Xu, Jerry A1 Gao, Rong A1 Wang, Hongjie A1 Li, Xianyuan A1 Lee, Sang A1 Cui, David A1 Naik, Mehul A1 Xia, Li-Qun A1 Xu, Qiang A1 Zhang, Ziying A1 Bei, Emily PB The Electrochemical Society YR 2009 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 18 IS 1 SP 605 OP 610 LK http://dx.doi.org/https://doi.org/10.1149/1.3096509 DO https://doi.org/10.1149/1.3096509 SF ELIB - SuUB Bremen
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