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1 Ergebnisse
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Work Function Tuning of Ti[sub x]Si[sub y]N[sub z] Electrod..:
Fillot, F.
;
Maı̂trejean, S.
;
Pierre, F.
.
Electrochemical and Solid-State Letters. 12 (2009) 7 - p. H272 , 2009
Link:
https://doi.org/10.1149/1.3126495
RT Journal T1 <Title>Work Function Tuning of Ti[sub x]Si[sub y]N[sub z] Electrodes Using Partial Saturation of Chemisorbing Surface during Pulsing Chemical Vapor Deposition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3126495&Exemplar=1&LAN=DE A1 Fillot, F. A1 Maı̂trejean, S. A1 Pierre, F. A1 Chenevier, B. PB The Electrochemical Society YR 2009 SN 1099-0062 JF Electrochemical and Solid-State Letters VO 12 IS 7 SP H272 LK http://dx.doi.org/https://doi.org/10.1149/1.3126495 DO https://doi.org/10.1149/1.3126495 SF ELIB - SuUB Bremen
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