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CVD Selective Epitaxial Lateral Overgrowth Technique for 3D..:
Jung, Soon-Moon
;
Lim, Hoon
;
Kim, Kinam
Electrochemical and Solid-State Letters. 12 (2009) 10 - p. H392 , 2009
Link:
https://doi.org/10.1149/1.3194253
RT Journal T1 <Title>CVD Selective Epitaxial Lateral Overgrowth Technique for 3D Stacked SRAM Cell on SOI-Like Silicon Films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3194253&Exemplar=1&LAN=DE A1 Jung, Soon-Moon A1 Lim, Hoon A1 Kim, Kinam PB The Electrochemical Society YR 2009 SN 1099-0062 JF Electrochemical and Solid-State Letters VO 12 IS 10 SP H392 LK http://dx.doi.org/https://doi.org/10.1149/1.3194253 DO https://doi.org/10.1149/1.3194253 SF ELIB - SuUB Bremen
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