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The Effect of Material and Process Interactions on BEOL Int..:
Spooner, Terry A.
;
Arnold, John C.
;
Canaperi, Donald
...
ECS Transactions. 25 (2009) 7 - p. 279-289 , 2009
Link:
https://doi.org/10.1149/1.3203966
RT Journal T1
The Effect of Material and Process Interactions on BEOL Integration
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3203966&Exemplar=1&LAN=DE A1 Spooner, Terry A. A1 Arnold, John C. A1 Canaperi, Donald A1 Chen, James A1 Chen, Shyng-Tsong A1 Gates, Stephen M. A1 Isobayashi, Atsunobu A1 Leung, Pak A1 Papa Rao, Satyavolu S. A1 Sankarapandian, Muthumanickam A1 Shobha, Hosadurga A1 Van der Straten, O. PB The Electrochemical Society YR 2009 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 25 IS 7 SP 279 OP 289 LK http://dx.doi.org/https://doi.org/10.1149/1.3203966 DO https://doi.org/10.1149/1.3203966 SF ELIB - SuUB Bremen
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