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1 Ergebnisse
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Assessing Various Analytical Techniques with Different Late..:
Beckhoff, Burkhard
;
Nutsch, Andreas
;
Altmann, Roswitha
...
ECS Transactions. 25 (2009) 3 - p. 311-323 , 2009
Link:
https://doi.org/10.1149/1.3204421
RT Journal T1
Assessing Various Analytical Techniques with Different Lateral Resolution by Investigating Spin-coated Inorganic Contamination on Si Wafer Surfaces
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3204421&Exemplar=1&LAN=DE A1 Beckhoff, Burkhard A1 Nutsch, Andreas A1 Altmann, Roswitha A1 Borionetti, Gabriella A1 Pello, C. A1 Polignano, Maria Luisa A1 Codegoni, Davide A1 Grasso, Salvatore A1 Cazzini, Elena A1 Bersani, Massimo A1 Gennaro, Salvatore A1 Kolbe, Michael A1 Mueller, Matthias A1 Kregsamer, Peter A1 Posch, Florian PB The Electrochemical Society YR 2009 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 25 IS 3 SP 311 OP 323 LK http://dx.doi.org/https://doi.org/10.1149/1.3204421 DO https://doi.org/10.1149/1.3204421 SF ELIB - SuUB Bremen
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