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Measurement of CMP Slurry Abrasive Size Distribution by Sca..:
Kim, Hojoong
;
Yang, Ji Chul
;
Kim, Taesung
Electrochemical and Solid-State Letters. 13 (2010) 4 - p. H137 , 2010
Link:
https://doi.org/10.1149/1.3299254
RT Journal T1 <Title>Measurement of CMP Slurry Abrasive Size Distribution by Scanning Mobility Particle Sizer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3299254&Exemplar=1&LAN=DE A1 Kim, Hojoong A1 Yang, Ji Chul A1 Kim, Taesung PB The Electrochemical Society YR 2010 SN 1099-0062 JF Electrochemical and Solid-State Letters VO 13 IS 4 SP H137 LK http://dx.doi.org/https://doi.org/10.1149/1.3299254 DO https://doi.org/10.1149/1.3299254 SF ELIB - SuUB Bremen
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