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1 Ergebnisse
1
From Computational Lithography to Computational Inspection:..:
Pang, Linyong
;
Peng, Danping
;
Hu, Peter
...
ECS Transactions. 27 (2010) 1 - p. 433-442 , 2010
Link:
https://doi.org/10.1149/1.3360656
RT Journal T1
From Computational Lithography to Computational Inspection: Inverse Lithography Technology (ILT) and Inverse Inspection Technology (IIT)
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3360656&Exemplar=1&LAN=DE A1 Pang, Linyong A1 Peng, Danping A1 Hu, Peter A1 Chen, Dongxue A1 Cecil, Tom A1 He, Lin A1 Xiao, Guangming A1 Tolani, Vikram A1 Dam, Thuc A1 Baik, KiHo A1 Gleason, Bob PB The Electrochemical Society YR 2010 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 27 IS 1 SP 433 OP 442 LK http://dx.doi.org/https://doi.org/10.1149/1.3360656 DO https://doi.org/10.1149/1.3360656 SF ELIB - SuUB Bremen
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