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1 Ergebnisse
1
Bottom-Anti-Reflective Coatings (BARC) for LFLE Double Patt..:
Sakamoto, Rikimaru
;
Endo, Takafumi
;
Ho, Banghing
...
ECS Transactions. 27 (2010) 1 - p. 479-487 , 2010
Link:
https://doi.org/10.1149/1.3360663
RT Journal T1
Bottom-Anti-Reflective Coatings (BARC) for LFLE Double Patterning Process
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3360663&Exemplar=1&LAN=DE A1 Sakamoto, Rikimaru A1 Endo, Takafumi A1 Ho, Banghing A1 Kimura, Shigeo A1 Ishida, Tomohisa A1 Kato, Masakazu A1 Fujitani, Noriaki A1 Onishi, Ryuji A1 Hiroi, Yoshiomi A1 Maruyama, Daisuke PB The Electrochemical Society YR 2010 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 27 IS 1 SP 479 OP 487 LK http://dx.doi.org/https://doi.org/10.1149/1.3360663 DO https://doi.org/10.1149/1.3360663 SF ELIB - SuUB Bremen
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