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1 Ergebnisse
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Damage-Free Design of a Megasonic Waveguide for Single-Wafe..:
Ahn, Youngki
;
Yoo, Donghyun
;
Yang, Jichul
...
Electrochemical and Solid-State Letters. 13 (2010) 6 - p. H222 , 2010
Link:
https://doi.org/10.1149/1.3381024
RT Journal T1 <Title>Damage-Free Design of a Megasonic Waveguide for Single-Wafer Processing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3381024&Exemplar=1&LAN=DE A1 Ahn, Youngki A1 Yoo, Donghyun A1 Yang, Jichul A1 Min, Jaewon A1 Kim, Jeongin A1 Lee, Heemyung A1 Kulkarni, Atul A1 Kim, Taesung PB The Electrochemical Society YR 2010 SN 1099-0062 JF Electrochemical and Solid-State Letters VO 13 IS 6 SP H222 LK http://dx.doi.org/https://doi.org/10.1149/1.3381024 DO https://doi.org/10.1149/1.3381024 SF ELIB - SuUB Bremen
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