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1 Ergebnisse
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Effects of Process Variables on TiN Particle Formation duri..:
Na, Jeonggil
;
Kim, Taesung
;
Choi, Jae-Boong
...
Electrochemical and Solid-State Letters. 13 (2010) 7 - p. H248 , 2010
Link:
https://doi.org/10.1149/1.3418338
RT Journal T1 <Title>Effects of Process Variables on TiN Particle Formation during Metallorganic Chemical Vapor Deposition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3418338&Exemplar=1&LAN=DE A1 Na, Jeonggil A1 Kim, Taesung A1 Choi, Jae-Boong A1 Kim, Young-Jin A1 Shin, Yong-Hyeon A1 Yun, Ju-Young A1 Kang, Sang-Woo PB The Electrochemical Society YR 2010 SN 1099-0062 JF Electrochemical and Solid-State Letters VO 13 IS 7 SP H248 LK http://dx.doi.org/https://doi.org/10.1149/1.3418338 DO https://doi.org/10.1149/1.3418338 SF ELIB - SuUB Bremen
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