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CVD of Pure Copper Films from Amidinate Precursor:
Krisyuk, Vladislav
;
Aloui, Lyacine
;
Prud'homme, Natalie
...
Electrochemical and Solid-State Letters. 14 (2011) 3 - p. D26 , 2011
Link:
https://doi.org/10.1149/1.3526142
RT Journal T1 <Title>CVD of Pure Copper Films from Amidinate Precursor</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3526142&Exemplar=1&LAN=DE A1 Krisyuk, Vladislav A1 Aloui, Lyacine A1 Prud'homme, Natalie A1 Sysoev, Sergey A1 Senocq, François A1 Samélor, Diane A1 Vahlas, Constantin PB The Electrochemical Society YR 2011 SN 1099-0062 JF Electrochemical and Solid-State Letters VO 14 IS 3 SP D26 LK http://dx.doi.org/https://doi.org/10.1149/1.3526142 DO https://doi.org/10.1149/1.3526142 SF ELIB - SuUB Bremen
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