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1 Ergebnisse
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Study to Transfer 0.11μm DRAM ArF Process to KrF Process in..:
Liu, Joe
;
Yao, Eric
;
Fan, Erics
...
ECS Transactions. 34 (2011) 1 - p. 285-302 , 2011
Link:
https://doi.org/10.1149/1.3567594
RT Journal T1 <Title>Study to Transfer 0.11μm DRAM ArF Process to KrF Process in Litho</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3567594&Exemplar=1&LAN=DE A1 Liu, Joe A1 Yao, Eric A1 Fan, Erics A1 Chang, Kent A1 Lv, Ted A1 Zhang, Jeff A1 Liang, Lee A1 Hong, Jerry A1 Li, Mars PB The Electrochemical Society YR 2011 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 34 IS 1 SP 285 OP 302 LK http://dx.doi.org/https://doi.org/10.1149/1.3567594 DO https://doi.org/10.1149/1.3567594 SF ELIB - SuUB Bremen
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