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Use of Urea-Choline Chloride Eutectic Solvent for Back End ..:
Thanu, D. P. R.
;
Raghavan, S.
;
Keswani, M.
Electrochemical and Solid-State Letters. 14 (2011) 9 - p. H358 , 2011
Link:
https://doi.org/10.1149/1.3597656
RT Journal T1 <Title>Use of Urea-Choline Chloride Eutectic Solvent for Back End of Line Cleaning Applications</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3597656&Exemplar=1&LAN=DE A1 Thanu, D. P. R. A1 Raghavan, S. A1 Keswani, M. PB The Electrochemical Society YR 2011 SN 1099-0062 JF Electrochemical and Solid-State Letters VO 14 IS 9 SP H358 LK http://dx.doi.org/https://doi.org/10.1149/1.3597656 DO https://doi.org/10.1149/1.3597656 SF ELIB - SuUB Bremen
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