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1 Ergebnisse
1
Investigation of Intermittent Haze in 300mm SiGe Epitaxy Pr..:
He, Yonggen
;
He, Youfeng
;
Tu, Huojin
...
ECS Transactions. 44 (2012) 1 - p. 665-671 , 2012
Link:
https://doi.org/10.1149/1.3694385
RT Journal T1
Investigation of Intermittent Haze in 300mm SiGe Epitaxy Process and its Impact on PMOS Device Performance
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3694385&Exemplar=1&LAN=DE A1 He, Yonggen A1 He, Youfeng A1 Tu, Huojin A1 Jin, Lan A1 Lin, Jing A1 Xu, Weizhong A1 Yu, Tzu Chiang A1 Lu, Wei A1 Wu, Jinggang A1 Wang, Chenyu A1 Cong, Zhepeng A1 Tang, Ji Yue PB The Electrochemical Society YR 2012 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 44 IS 1 SP 665 OP 671 LK http://dx.doi.org/https://doi.org/10.1149/1.3694385 DO https://doi.org/10.1149/1.3694385 SF ELIB - SuUB Bremen
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