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1 Ergebnisse
1
Study on Defect Reduction and Yield Improvement of MIM Al D..:
Chang, Vincent
;
Gu, Athics
;
Li, Terry
...
ECS Transactions. 44 (2012) 1 - p. 791-796 , 2012
Link:
https://doi.org/10.1149/1.3694400
RT Journal T1
Study on Defect Reduction and Yield Improvement of MIM Al Deposition Process
UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1.3694400&Exemplar=1&LAN=DE A1 Chang, Vincent A1 Gu, Athics A1 Li, Terry A1 Zhang, Ji-Wei A1 Jiang, Jian-Yong A1 Lin, Paul-Chang PB The Electrochemical Society YR 2012 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 44 IS 1 SP 791 OP 796 LK http://dx.doi.org/https://doi.org/10.1149/1.3694400 DO https://doi.org/10.1149/1.3694400 SF ELIB - SuUB Bremen
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