I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Measuring Temporal Variation of Concentration of ALD Precur..:
Inada, Takafumi
;
Goto, Tetsuya
;
Suwa, Tomoyuki
...
ECS Transactions. 111 (2023) 1 - p. 3-10 , 2023
Link:
https://doi.org/10.1149/11101.0003ecst
RT Journal T1 <Title>Measuring Temporal Variation of Concentration of ALD Precursor TEMAZ in Process Chamber Using UV Absorption Method</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_11101.0003ecst&Exemplar=1&LAN=DE A1 Inada, Takafumi A1 Goto, Tetsuya A1 Suwa, Tomoyuki A1 Nagase, Masaaki A1 Ishii, Hidekazu A1 Shiba, Yoshinobu A1 Sakai, Yushi A1 Sutoh, Akihito A1 Morimoto, Tatsuo A1 Shirai, Yasuyuki A1 Kuroda, Rihito A1 Sugawa, Shigetoshi PB The Electrochemical Society YR 2023 SN 1938-5862 SN 1938-6737 JF ECS Transactions VO 111 IS 1 SP 3 OP 10 LK http://dx.doi.org/https://doi.org/10.1149/11101.0003ecst DO https://doi.org/10.1149/11101.0003ecst SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
