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1 Ergebnisse
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Electroless Deposition of Pure Co on TaN Substrate for Inte..:
Qiu, Li-Na
;
Ni, Zi-Hong
;
Wang, Ying-Jie
..
Journal of The Electrochemical Society. 169 (2022) 7 - p. 072507 , 2022
Link:
https://doi.org/10.1149/1945-7111/ac81fc
RT Journal T1 <Title>Electroless Deposition of Pure Co on TaN Substrate for Interconnect Metallization</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1945-7111_ac81fc&Exemplar=1&LAN=DE A1 Qiu, Li-Na A1 Ni, Zi-Hong A1 Wang, Ying-Jie A1 Hu, Chun-Feng A1 Qu, Xin-Ping PB The Electrochemical Society YR 2022 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 169 IS 7 SP 072507 LK http://dx.doi.org/https://doi.org/10.1149/1945-7111/ac81fc DO https://doi.org/10.1149/1945-7111/ac81fc SF ELIB - SuUB Bremen
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