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1 Ergebnisse
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Inhibition Effect and Mechanism of 2-Mercaptopyrimidine on ..:
Liu, Jianghao
;
Niu, Xinhuan
;
Zhan, Ni
...
Journal of The Electrochemical Society. 170 (2023) 10 - p. 101501 , 2023
Link:
https://doi.org/10.1149/1945-7111/ad0077
RT Journal T1 <Title>Inhibition Effect and Mechanism of 2-Mercaptopyrimidine on Cobalt-Based Copper Interconnects Chemical Mechanical Polishing: Combined Experimental and DFT Study</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_1945-7111_ad0077&Exemplar=1&LAN=DE A1 Liu, Jianghao A1 Niu, Xinhuan A1 Zhan, Ni A1 Zou, Yida A1 Yan, Han A1 Qu, Minghui A1 Luo, Fu A1 Shi, Yunhui A1 Zhou, Jianwei PB The Electrochemical Society YR 2023 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 170 IS 10 SP 101501 LK http://dx.doi.org/https://doi.org/10.1149/1945-7111/ad0077 DO https://doi.org/10.1149/1945-7111/ad0077 SF ELIB - SuUB Bremen
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