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Crystallographic Texture of Submicron Thin Aluminum Nitride..:

Sah, R. E. ; Kirste, L. ; Kirmse, H....
ECS Journal of Solid State Science and Technology.  2 (2013)  4 - p. P180-P184 , 2013
Link: https://doi.org/10.1149/2.001305jss