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1 Ergebnisse
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Atomic Layer Etching: An Industry Perspective:
T. Carver, Colin
;
J. Plombon, John
;
E. Romero, Patricio
...
ECS Journal of Solid State Science and Technology. 4 (2015) 6 - p. N5005-N5009 , 2015
Link:
https://doi.org/10.1149/2.0021506jss
RT Journal T1 <Title>Atomic Layer Etching: An Industry Perspective</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0021506jss&Exemplar=1&LAN=DE A1 T. Carver, Colin A1 J. Plombon, John A1 E. Romero, Patricio A1 Suri, Satyarth A1 A. Tronic, Tristan A1 B. Turkot Jr., Robert PB The Electrochemical Society YR 2015 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 4 IS 6 SP N5005 OP N5009 LK http://dx.doi.org/https://doi.org/10.1149/2.0021506jss DO https://doi.org/10.1149/2.0021506jss SF ELIB - SuUB Bremen
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