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1 Ergebnisse
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Effects of Hydroxyethyl Cellulose and Colloidal Silica Abra..:
Tsuchiya, Kohsuke
;
Mori, Yoshio
;
Kawaguchi, Masami
ECS Journal of Solid State Science and Technology. 6 (2017) 7 - p. P361-P364 , 2017
Link:
https://doi.org/10.1149/2.0021707jss
RT Journal T1 <Title>Effects of Hydroxyethyl Cellulose and Colloidal Silica Abrasive on the Hydrophilicity of Polished Si Wafer Surfaces</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0021707jss&Exemplar=1&LAN=DE A1 Tsuchiya, Kohsuke A1 Mori, Yoshio A1 Kawaguchi, Masami PB The Electrochemical Society YR 2017 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 6 IS 7 SP P361 OP P364 LK http://dx.doi.org/https://doi.org/10.1149/2.0021707jss DO https://doi.org/10.1149/2.0021707jss SF ELIB - SuUB Bremen
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