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Investigation of Argon Plasma Damage on Ultra Low-κ Dielect..:
Kubasch, C.
;
Olawumi, T.
;
Ruelke, H.
..
ECS Journal of Solid State Science and Technology. 4 (2014) 1 - p. N3023-N3028 , 2014
Link:
https://doi.org/10.1149/2.0041501jss
RT Journal T1 <Title>Investigation of Argon Plasma Damage on Ultra Low-κ Dielectrics</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0041501jss&Exemplar=1&LAN=DE A1 Kubasch, C. A1 Olawumi, T. A1 Ruelke, H. A1 Mayer, U. A1 Bartha, J. W. PB The Electrochemical Society YR 2014 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 4 IS 1 SP N3023 OP N3028 LK http://dx.doi.org/https://doi.org/10.1149/2.0041501jss DO https://doi.org/10.1149/2.0041501jss SF ELIB - SuUB Bremen
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