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1 Ergebnisse
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Nanoscale Chemical-Mechanical Characterization of Nanoelect..:
Lo, Michael K. F.
;
Dazzi, Alexandre
;
Marcott, Curtis A.
...
ECS Journal of Solid State Science and Technology. 5 (2015) 4 - p. P3018-P3024 , 2015
Link:
https://doi.org/10.1149/2.0041604jss
RT Journal T1 <Title>Nanoscale Chemical-Mechanical Characterization of Nanoelectronic Low-kDielectric/Cu Interconnects</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0041604jss&Exemplar=1&LAN=DE A1 Lo, Michael K. F. A1 Dazzi, Alexandre A1 Marcott, Curtis A. A1 Dillon, Eoghan A1 Hu, Qichi A1 Kjoller, Kevin A1 Prater, Craig B. A1 King, Sean W. PB The Electrochemical Society YR 2015 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 5 IS 4 SP P3018 OP P3024 LK http://dx.doi.org/https://doi.org/10.1149/2.0041604jss DO https://doi.org/10.1149/2.0041604jss SF ELIB - SuUB Bremen
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