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1 Ergebnisse
1
ALD Zirconium Oxide (ZrO2) Thin Films Mechanical/Structural..:
Mamun, M. A.
;
Baumgart, H.
;
Elmustafa, A. A.
ECS Journal of Solid State Science and Technology. 4 (2015) 5 - p. Q35-Q37 , 2015
Link:
https://doi.org/10.1149/2.0051505jss
RT Journal T1 <Title>ALD Zirconium Oxide (ZrO2) Thin Films Mechanical/Structural Properties for High-Tech Applications</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0051505jss&Exemplar=1&LAN=DE A1 Mamun, M. A. A1 Baumgart, H. A1 Elmustafa, A. A. PB The Electrochemical Society YR 2015 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 4 IS 5 SP Q35 OP Q37 LK http://dx.doi.org/https://doi.org/10.1149/2.0051505jss DO https://doi.org/10.1149/2.0051505jss SF ELIB - SuUB Bremen
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