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1 Ergebnisse
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Etch Damages of Ovonic Threshold Switch (OTS) Material by H..:
Park, Jin Woo
;
Kim, Doo San
;
Lee, Won Oh
...
ECS Journal of Solid State Science and Technology. 8 (2019) 6 - p. P341-P345 , 2019
Link:
https://doi.org/10.1149/2.0051906jss
RT Journal T1 <Title>Etch Damages of Ovonic Threshold Switch (OTS) Material by Halogen Gas Based-Inductively Coupled Plasmas</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0051906jss&Exemplar=1&LAN=DE A1 Park, Jin Woo A1 Kim, Doo San A1 Lee, Won Oh A1 Kim, Ju Eun A1 Choi, HyeJin A1 Kwon, OIk A1 Chung, SeungPil A1 Yeom, Geun Young PB The Electrochemical Society YR 2019 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 8 IS 6 SP P341 OP P345 LK http://dx.doi.org/https://doi.org/10.1149/2.0051906jss DO https://doi.org/10.1149/2.0051906jss SF ELIB - SuUB Bremen
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