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Fabrication Mechanism for Patterned Sapphire Substrates by ..:
Aota, Natsuko
;
Aida, Hideo
;
Kimura, Yutaka
..
ECS Journal of Solid State Science and Technology. 3 (2014) 5 - p. N69-N74 , 2014
Link:
https://doi.org/10.1149/2.005405jss
RT Journal T1 <Title>Fabrication Mechanism for Patterned Sapphire Substrates by Wet Etching</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.005405jss&Exemplar=1&LAN=DE A1 Aota, Natsuko A1 Aida, Hideo A1 Kimura, Yutaka A1 Kawamata, Yuki A1 Uneda, Michio PB The Electrochemical Society YR 2014 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 3 IS 5 SP N69 OP N74 LK http://dx.doi.org/https://doi.org/10.1149/2.005405jss DO https://doi.org/10.1149/2.005405jss SF ELIB - SuUB Bremen
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