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Ultra-Rapid Determination of Material Removal Rates Based S..:
Stuffle, Calliandra
;
Bengochea, Leticia Vazquez
;
Sampurno, Yasa
.
ECS Journal of Solid State Science and Technology. 8 (2019) 5 - p. P3035-P3039 , 2019
Link:
https://doi.org/10.1149/2.0061905jss
RT Journal T1 <Title>Ultra-Rapid Determination of Material Removal Rates Based Solely on Tribological Data in Chemical Mechanical Planarization</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0061905jss&Exemplar=1&LAN=DE A1 Stuffle, Calliandra A1 Bengochea, Leticia Vazquez A1 Sampurno, Yasa A1 Philipossian, Ara PB The Electrochemical Society YR 2019 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 8 IS 5 SP P3035 OP P3039 LK http://dx.doi.org/https://doi.org/10.1149/2.0061905jss DO https://doi.org/10.1149/2.0061905jss SF ELIB - SuUB Bremen
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