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Micromolding of NiFe and Ni Thick Films for 3D Integration ..:
Cortes, Meritxell
;
Moulin, Johan
;
Couty, Magdalèna
...
Journal of The Electrochemical Society. 161 (2013) 2 - p. B3038-B3043 , 2013
Link:
https://doi.org/10.1149/2.006402jes
RT Journal T1 <Title>Micromolding of NiFe and Ni Thick Films for 3D Integration of MEMS</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.006402jes&Exemplar=1&LAN=DE A1 Cortes, Meritxell A1 Moulin, Johan A1 Couty, Magdalèna A1 Peng, Tao A1 Garel, Olivier A1 Dinh, Thi Hong Nhung A1 Zhu, Yanan A1 Souadda, Malika A1 Woytasik, Marion A1 Lefeuvre, Elie PB The Electrochemical Society YR 2013 SN 0013-4651 SN 1945-7111 JF Journal of The Electrochemical Society VO 161 IS 2 SP B3038 OP B3043 LK http://dx.doi.org/https://doi.org/10.1149/2.006402jes DO https://doi.org/10.1149/2.006402jes SF ELIB - SuUB Bremen
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