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1 Ergebnisse
1
The Effects of Plasma Treatments and Subsequent Atomic Laye..:
Verdonck, P.
;
Maheshwari, A.
;
Swerts, J.
...
ECS Journal of Solid State Science and Technology. 2 (2013) 5 - p. N103-N109 , 2013
Link:
https://doi.org/10.1149/2.007305jss
RT Journal T1 <Title>The Effects of Plasma Treatments and Subsequent Atomic Layer Deposition on the Pore Structure of a k = 2.0 Low-k Material</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.007305jss&Exemplar=1&LAN=DE A1 Verdonck, P. A1 Maheshwari, A. A1 Swerts, J. A1 Delabie, A. A1 Witters, T. A1 Tielens, H. A1 Dewilde, S. A1 Franquet, A. A1 Meersschaut, J. A1 Conard, T. A1 Prado, J. Loyo A1 Armini, S. A1 Baklanov, M. R. A1 Van Elshocht, S. A1 Uedono, A. A1 Huanca, Danilo Roque A1 dos Santos Filho, S. Gomes A1 Kellerman, Guinther PB The Electrochemical Society YR 2013 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 2 IS 5 SP N103 OP N109 LK http://dx.doi.org/https://doi.org/10.1149/2.007305jss DO https://doi.org/10.1149/2.007305jss SF ELIB - SuUB Bremen
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