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1 Ergebnisse
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Oxygen Plasma and Humidity Dependent Surface Analysis of Si..:
Alam, A. U.
;
Howlader, M. M. R.
;
Deen, M. J.
ECS Journal of Solid State Science and Technology. 2 (2013) 12 - p. P515-P523 , 2013
Link:
https://doi.org/10.1149/2.007312jss
RT Journal T1 <Title>Oxygen Plasma and Humidity Dependent Surface Analysis of Silicon, Silicon Dioxide and Glass for Direct Wafer Bonding</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.007312jss&Exemplar=1&LAN=DE A1 Alam, A. U. A1 Howlader, M. M. R. A1 Deen, M. J. PB The Electrochemical Society YR 2013 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 2 IS 12 SP P515 OP P523 LK http://dx.doi.org/https://doi.org/10.1149/2.007312jss DO https://doi.org/10.1149/2.007312jss SF ELIB - SuUB Bremen
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