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Surface Passivation by Al2O3anda-SiNx: H Films Deposited on..:

Bordihn, S. ; Mertens, V. ; Engelhart, P....
ECS Journal of Solid State Science and Technology.  1 (2012)  6 - p. P320-P325 , 2012
Link: https://doi.org/10.1149/2.008301jss