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Review—Investigation and Review of the Thermal, Mechanical,..:
Gaskins, John T.
;
Hopkins, Patrick E.
;
Merrill, Devin R.
...
ECS Journal of Solid State Science and Technology. 6 (2017) 10 - p. N189-N208 , 2017
Link:
https://doi.org/10.1149/2.0091710jss
RT Journal T1 <Title>Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High-kDielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0091710jss&Exemplar=1&LAN=DE A1 Gaskins, John T. A1 Hopkins, Patrick E. A1 Merrill, Devin R. A1 Bauers, Sage R. A1 Hadland, Erik A1 Johnson, David C. A1 Koh, Donghyi A1 Yum, Jung Hwan A1 Banerjee, Sanjay A1 Nordell, Bradley J. A1 Paquette, Michelle M. A1 Caruso, Anthony N. A1 Lanford, William A. A1 Henry, Patrick A1 Ross, Liza A1 Li, Han A1 Li, Liyi A1 French, Marc A1 Rudolph, Antonio M. A1 King, Sean W. PB The Electrochemical Society YR 2017 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 6 IS 10 SP N189 OP N208 LK http://dx.doi.org/https://doi.org/10.1149/2.0091710jss DO https://doi.org/10.1149/2.0091710jss SF ELIB - SuUB Bremen
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