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Application of a Slurry Injection System to Cobalt "Buff St..:
Stuffle, Calliandra
;
Han, Ruochen
;
Sampurno, Yasa
...
ECS Journal of Solid State Science and Technology. 7 (2018) 4 - p. P170-P174 , 2018
Link:
https://doi.org/10.1149/2.0101804jss
RT Journal T1 <Title>Application of a Slurry Injection System to Cobalt "Buff Step" Chemical Mechanical Planarization</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0101804jss&Exemplar=1&LAN=DE A1 Stuffle, Calliandra A1 Han, Ruochen A1 Sampurno, Yasa A1 Theng, Siannie A1 Tseng, Wei-Tsu A1 Philipossian, Ara PB The Electrochemical Society YR 2018 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 7 IS 4 SP P170 OP P174 LK http://dx.doi.org/https://doi.org/10.1149/2.0101804jss DO https://doi.org/10.1149/2.0101804jss SF ELIB - SuUB Bremen
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