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1 Ergebnisse
1
Selection and Optimization of Corrosion Inhibitors for Impr..:
Ryu, Heon-Yul
;
Cho, Byoung-Jun
;
Yerriboina, Nagendra Prasad
...
ECS Journal of Solid State Science and Technology. 8 (2019) 5 - p. P3058-P3062 , 2019
Link:
https://doi.org/10.1149/2.0101905jss
RT Journal T1 <Title>Selection and Optimization of Corrosion Inhibitors for Improved Cu CMP and Post-Cu CMP Cleaning</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0101905jss&Exemplar=1&LAN=DE A1 Ryu, Heon-Yul A1 Cho, Byoung-Jun A1 Yerriboina, Nagendra Prasad A1 Lee, Chan-Hee A1 Hwang, Jun-Kil A1 Hamada, Satomi A1 Wada, Yutaka A1 Hiyama, Hirokuni A1 Park, Jin-Goo PB The Electrochemical Society YR 2019 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 8 IS 5 SP P3058 OP P3062 LK http://dx.doi.org/https://doi.org/10.1149/2.0101905jss DO https://doi.org/10.1149/2.0101905jss SF ELIB - SuUB Bremen
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