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1 Ergebnisse
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Frictional Characteristic of Polymeric Additive for the Slu..:
Kim, Hojoong
;
Yang, Ji Chul
;
Lee, Junwye
...
ECS Journal of Solid State Science and Technology. 1 (2012) 3 - p. P101-P106 , 2012
Link:
https://doi.org/10.1149/2.011203jss
RT Journal T1 <Title>Frictional Characteristic of Polymeric Additive for the Slurry of Chemical Mechanical Planarization Process</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.011203jss&Exemplar=1&LAN=DE A1 Kim, Hojoong A1 Yang, Ji Chul A1 Lee, Junwye A1 Park, Sung Ha A1 Won, Jehyung A1 Kim, Mingu A1 Kim, Taesung PB The Electrochemical Society YR 2012 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 1 IS 3 SP P101 OP P106 LK http://dx.doi.org/https://doi.org/10.1149/2.011203jss DO https://doi.org/10.1149/2.011203jss SF ELIB - SuUB Bremen
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