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Implantation and Activation of Phosphorus in Amorphous and ..:

Lieten, R. R. ; Douhard, B. ; Stesmans, A....
ECS Journal of Solid State Science and Technology.  2 (2013)  9 - p. P346-P350 , 2013
Link: https://doi.org/10.1149/2.011309jss