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Effect of Ultrathin Silicon Oxide Film for Enhanced Perform..:
Chae, Hee Jae
;
Kim, Hyung Yoon
;
Lee, Sol Kyu
...
ECS Journal of Solid State Science and Technology. 5 (2016) 12 - p. Q279-Q283 , 2016
Link:
https://doi.org/10.1149/2.0121614jss
RT Journal T1 <Title>Effect of Ultrathin Silicon Oxide Film for Enhanced Performance and Reliability of Metal-Induced Laterally Crystallized Thin-Film Transistors Using Silicon Nitride as a Gate Dielectric</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0121614jss&Exemplar=1&LAN=DE A1 Chae, Hee Jae A1 Kim, Hyung Yoon A1 Lee, Sol Kyu A1 Seok, Ki Hwan A1 Lee, Yong Hee A1 Kiaee, Zohreh A1 Joo, Seung Ki PB The Electrochemical Society YR 2016 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 5 IS 12 SP Q279 OP Q283 LK http://dx.doi.org/https://doi.org/10.1149/2.0121614jss DO https://doi.org/10.1149/2.0121614jss SF ELIB - SuUB Bremen
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