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Visualization of Plasma Etching Damage of Si Using Room Tem..:

Jang Jian, Shiu-Ko ; Jeng, Chih-Cherng ; Wang, Ting-Chun...
ECS Journal of Solid State Science and Technology.  2 (2013)  5 - p. P214-P224 , 2013
Link: https://doi.org/10.1149/2.013305jss