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1 Ergebnisse
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Morphology of Oxygen Precipitates in RTA Pre-Treated Czochr..:
Kot, D.
;
Kissinger, G.
;
Schubert, M. A.
.
ECS Journal of Solid State Science and Technology. 3 (2014) 11 - p. P370-P375 , 2014
Link:
https://doi.org/10.1149/2.0141411jss
RT Journal T1 <Title>Morphology of Oxygen Precipitates in RTA Pre-Treated Czochralski Silicon Wafers Investigated by FTIR Spectroscopy and STEM</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0141411jss&Exemplar=1&LAN=DE A1 Kot, D. A1 Kissinger, G. A1 Schubert, M. A. A1 Sattler, A. PB The Electrochemical Society YR 2014 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 3 IS 11 SP P370 OP P375 LK http://dx.doi.org/https://doi.org/10.1149/2.0141411jss DO https://doi.org/10.1149/2.0141411jss SF ELIB - SuUB Bremen
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