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UTBOX SOI Substrate with Composite Insulating Layer:
Landru, Didier
;
Allibert, Frédéric
;
Daval, Nicolas
.
ECS Journal of Solid State Science and Technology. 2 (2013) 6 - p. Q83-Q87 , 2013
Link:
https://doi.org/10.1149/2.014306jss
RT Journal T1 <Title>UTBOX SOI Substrate with Composite Insulating Layer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.014306jss&Exemplar=1&LAN=DE A1 Landru, Didier A1 Allibert, Frédéric A1 Daval, Nicolas A1 Kononchuk, Oleg PB The Electrochemical Society YR 2013 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 2 IS 6 SP Q83 OP Q87 LK http://dx.doi.org/https://doi.org/10.1149/2.014306jss DO https://doi.org/10.1149/2.014306jss SF ELIB - SuUB Bremen
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