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Low Frequency Noise Analysis of Impact of Metal Gate Proces..:
Claeys, C.
;
He, L.
;
O'Sullivan, B. J.
...
ECS Journal of Solid State Science and Technology. 7 (2018) 3 - p. Q26-Q32 , 2018
Link:
https://doi.org/10.1149/2.0151803jss
RT Journal T1 <Title>Low Frequency Noise Analysis of Impact of Metal Gate Processing on the Gate Oxide Stack Quality</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0151803jss&Exemplar=1&LAN=DE A1 Claeys, C. A1 He, L. A1 O'Sullivan, B. J. A1 Veloso, A. A1 Horiguchi, N. A1 Collaert, N. A1 Simoen, E. PB The Electrochemical Society YR 2018 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 7 IS 3 SP Q26 OP Q32 LK http://dx.doi.org/https://doi.org/10.1149/2.0151803jss DO https://doi.org/10.1149/2.0151803jss SF ELIB - SuUB Bremen
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