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Very Low Temperature (Cyclic) Deposition / Etch of In Situ ..:

Hartmann, J. M. ; Benevent, V. ; André, A....
ECS Journal of Solid State Science and Technology.  3 (2014)  11 - p. P382-P390 , 2014
Link: https://doi.org/10.1149/2.0161411jss