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1 Ergebnisse
1
A Combined Gas Cluster Ion Beam (GCIB) and Chemical-Mechani..:
Tseng, Wei-Tsu
;
Long, Justin
;
Mohan, Kaushik
...
ECS Journal of Solid State Science and Technology. 5 (2016) 7 - p. P404-P408 , 2016
Link:
https://doi.org/10.1149/2.0161607jss
RT Journal T1 <Title>A Combined Gas Cluster Ion Beam (GCIB) and Chemical-Mechanical Polish (CMP) Planarization Scheme for Tungsten Replacement Metal Gate (W-RMG)</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0161607jss&Exemplar=1&LAN=DE A1 Tseng, Wei-Tsu A1 Long, Justin A1 Mohan, Kaushik A1 Kagalwala, Taher A1 Wu, Changhong A1 Truong, Connie PB The Electrochemical Society YR 2016 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 5 IS 7 SP P404 OP P408 LK http://dx.doi.org/https://doi.org/10.1149/2.0161607jss DO https://doi.org/10.1149/2.0161607jss SF ELIB - SuUB Bremen
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