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1 Ergebnisse
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High-Performance Metal Hard Mask Process Using Fiber-Textur..:
Torazawa, Naoki
;
Harada, Takeshi
;
Kabe, Tatsuya
...
ECS Journal of Solid State Science and Technology. 5 (2016) 9 - p. P489-P494 , 2016
Link:
https://doi.org/10.1149/2.0161609jss
RT Journal T1 <Title>High-Performance Metal Hard Mask Process Using Fiber-Textured TiN Film for Cu Interconnects</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0161609jss&Exemplar=1&LAN=DE A1 Torazawa, Naoki A1 Harada, Takeshi A1 Kabe, Tatsuya A1 Inagaki, Daisuke A1 Morinaga, Yasunori A1 Motojima, Dai A1 Matsumoto, Susumu PB The Electrochemical Society YR 2016 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 5 IS 9 SP P489 OP P494 LK http://dx.doi.org/https://doi.org/10.1149/2.0161609jss DO https://doi.org/10.1149/2.0161609jss SF ELIB - SuUB Bremen
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