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Synthesis of Anodic Oxide Thin Films on Si{100} Wafers and ..:
Ashok, Akarapu
;
Pal, Prem
ECS Journal of Solid State Science and Technology. 4 (2014) 2 - p. Q1-Q7 , 2014
Link:
https://doi.org/10.1149/2.0171502jss
RT Journal T1 <Title>Synthesis of Anodic Oxide Thin Films on Si{100} Wafers and Their Characterization in TMAH for MEMS</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0171502jss&Exemplar=1&LAN=DE A1 Ashok, Akarapu A1 Pal, Prem PB The Electrochemical Society YR 2014 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 4 IS 2 SP Q1 OP Q7 LK http://dx.doi.org/https://doi.org/10.1149/2.0171502jss DO https://doi.org/10.1149/2.0171502jss SF ELIB - SuUB Bremen
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