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1 Ergebnisse
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Water Outlet Design of Wet Cleaning Bath for 300-mm Diamete..:
Matsuo, Miya
;
Miyazaki, Kento
;
Habuka, Hitoshi
.
ECS Journal of Solid State Science and Technology. 7 (2018) 9 - p. N123-N127 , 2018
Link:
https://doi.org/10.1149/2.0171809jss
RT Journal T1 <Title>Water Outlet Design of Wet Cleaning Bath for 300-mm Diameter Silicon Wafers</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1149_2.0171809jss&Exemplar=1&LAN=DE A1 Matsuo, Miya A1 Miyazaki, Kento A1 Habuka, Hitoshi A1 Goto, Akihiro PB The Electrochemical Society YR 2018 SN 2162-8769 SN 2162-8777 JF ECS Journal of Solid State Science and Technology VO 7 IS 9 SP N123 OP N127 LK http://dx.doi.org/https://doi.org/10.1149/2.0171809jss DO https://doi.org/10.1149/2.0171809jss SF ELIB - SuUB Bremen
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